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Metal-Semiconductor Interfaces

Akio Hiraki, Osaka University, Japan, et al.
180x260mm pp.414 Yen9515 1995

This book is the final report on a research project titled "Metal-Semiconductor Interfaces: A Key Problem for Ultimate Microelectronics" conducted by 90 eminent researchers across Japan between 1989 and 1992.

Contents

Chapter.1 Theoretical Approaches to Metal-Semiconductor Interfaces
Chapter.2 Initial Stage of M-S Interface Formation
Chapter.3 Interface Structure of M-S Systems
Chapter.4 Realization and Control of Contact Characterization
Chapter.5 Novel Characterization Techniques of Buried Interfaces
Chapter.6 Perspectives

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